Seminaari 2001 (Elektroniikan materiaalit ja mikrosysteemit)

Annual seminar of the Research Programme on Electronics Materials and Microsystems was arranged on October 11th, 2001 in Innopoli, Otaniemi, Espoo

Programme

1st Session

Welcome and introduction
Professor Pekka Hautojärvi

Aspects of high aspect ratio silicon processing
Sami Franssila, Helsinki University of Technology, Microelectronics Centre

Design and Fabrication of Advanced Semiconductor Structures and Devices for Optoelectronics
Professor Markus Pessa, Tampere University of Technology, Optoelectronics Research Center
Kimmo Saarinen, Helsinki University of Technology, Physics

Structure and kinetics of defect complexes in semiconductors
Academy professor Risto Nieminen, Helsinki University of Technology, Physics

Light Amplification in Silicon
PhD Leonid Khriachtchev, University of Helsinki, Physical Chemistry

Sulfonated poly(ethylene – co-styrene) Membranes
Minna Annala, Helsinki University of Technology, Polymer Technology

Molecular electronics based on polypyride
Matti Knaapila, Helsinki University of Technology, Material Physics

Interatomic potential for non-equilibrium effects in GaN
Janne Nord, University of Helsinki, Accelerator Laboratory

2nd Session

Fabrication of thin films for electronics by chemically controlled methods
Professor Markku Leskelä, University of Helsinki, Department of Chemistry

New approaches to the Atomic Layer Deposition of transition metal nitrides
Mikko Ritala, University of Helsinki, Department of Chemistry

Modification of porous silicon for sensor applications
Johanna Johansson, Helsinki University of Technology, Inorganic and Analytical Chemistry

Materials-Based Microwave Filter Technologies
Professor Martti M. Salomaa, Helsinki University of Technology, Material Physics

3rd Session

High-Q mechanical oscillators
Ossi Hahtela, Helsinki University of Technology, Metrology Research Institute

Nanoindentation of silicon for MEMS
Visiting Professor Roman Nowak, Helsinki University of Technology, Physical Metallurgy and Materials Science

Anisotropic wet chemical etching of crystalline silicon: atomistic Monte-Carlo simulations and experiments
Miquel Gosalvez, Helsinki University of Technology, COMP/Laboratory of Physics

MEMMS –consortium;
Application of superconductor-semiconductor structure with Schottky barrier for thermometry and microcoolers
Alexander Savin, Jyväskylä University, Physics Department

Fabrication and Stability of High Density Build-up Structures in Electronic Modules
Tomi Laurila, Helsinki University of Technology, Electronics Production Technology