IR/visual dynamic characterization of NEMS/MEMS devices
IRC-MEMS-consortium

Franssila Sami, Aalto University (School of Science and Technology), Haeggstrom Edward, UH

This project produces a photonics-based NEMS/MEMS device characterization tool. We propose to develop a unique stroboscopic near infrared (NIR) scanning white light interferometer to dynamically characterize multi-layer micro- and nanostructures. Extending the optical range of a scanning white light interferometry (SWLI) instrument into the NIR range allows measuring both surfaces of infrared (IR) transparent silicon devices, as well as the inner structure of a MEMS device membrane or cantilever. This produces surface profile data of fabricated device structures to verify microfabrication and to validate modelling.

Moreover, we propose to develop and fabricate micro fuel cells and measure cell membrane mechanics during device operation. Additionally the method will be used to measure RF metamaterials and acoustic microdevices. These applications serve as proof of concept that the new instrument pushes the state of art and that it provides potential for a paradigm shift in MEMS testing.